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1 variable gap electrostatic actuator
електростатичний актюатор із змінною щілиноюEnglish-Ukrainian dictionary of microelectronics > variable gap electrostatic actuator
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2 actuator
актюатор, мікровиконавчий пристрій. Деякий збудливий механізм, який приводить в дію пристрій - electromagnetic actuator
- electrostatic actuator
- flexible micro-actuator
- hydraulic actuator
- light driven actuator
- linear actuator
- piezoelectric actuator
- thermal actuator
- variable gap electrostatic actuator
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